Tsinghua University in Taiwan has successfully developed a tactile sensor that uses CMOS technology in almost all processes. In the sensor developed this time, the hand touch portion is composed of a metal film with a protective film, and this film forms a capacitor with the underlying metal film. After the hand is touched, the distance between the metal films becomes small and the capacity of the capacitor changes. Through this change, the perception of touch is realized.
In order to achieve development under the CMOS process, the sacrificial layer uses metal. In this way, the metal film is etched together in the sacrificial layer etching stage, so the final desired metal film is passivated in advance to ensure that it is not etched. The prototype was subjected to a 0.35 μm process of a 2-layer polymer 4-layer metal of TSMC.
In order to achieve development under the CMOS process, the sacrificial layer uses metal. In this way, the metal film is etched together in the sacrificial layer etching stage, so the final desired metal film is passivated in advance to ensure that it is not etched. The prototype was subjected to a 0.35 μm process of a 2-layer polymer 4-layer metal of TSMC.
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